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  •   Journal Cankaya University Journal of Science and Engineering
MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi Araştırma Makalesi Ender Yıldırım , Tayfun Akın , M. A. Sahir Arıkan , (2012), Cankaya University Journal of Science and Engineering, Volume 9, Issue 1, 2012, - ,
micro bending test structure, whose actuator, sample, and readout scale are integrally fabricated
electrostatic actuator
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